Imaging device

An imaging device having a plurality of pixels, the imaging device comprising:

• a semiconductor substrate in which a plurality of doped regions are provided;
• and
• a photoelectric converter to generate a charge, wherein,
• each pixel includes:
• a portion of the photoelectric converter;
• one of the plurality of doped regions;
• and
• a contact plug electrically connected to the one of the plurality of doped regions;
• and
• the semiconductor substrate includes a carbon-containing layer that contains carbon, the carbon-containing layer being located between the doped regions and the contact plugs.

An imaging device comprising:

• an imaging region including a plurality of pixels, each pixel including a photoelectric converter to generate a charge, and a first doped region electrically connected to the photoelectric converter;
• a peripheral region located outside of the imaging region, with a circuit to drive the plurality of pixels being provided in the peripheral region;
• a second doped region of a first conductivity type located between the imaging region and the peripheral region;
• a plurality of first contact plugs connected to the second doped region, and
• a carbon-containing layer that contains carbon, the carbon-containing layer being located below the plurality of first contact plugs.