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US 12,193,221 B2Granted
Semiconductor structure and method for forming the same
AssigneeWinbond Electronics Corp.
InventorsWei-Che Chang, Kai Jen, Yu-Po Wang
Life of this patent
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Abstract
A semiconductor structure includes a semiconductor substrate and an isolation structure disposed in the semiconductor substrate. The isolation structure includes a lining layer disposed along a boundary between the semiconductor substrate and the isolation structure, a first oxide fill layer disposed over the lining layer, a dielectric barrier structure surrounding the first oxide fill layer in a closed loop, and a second oxide fill layer disposed over the dielectric barrier structure and adjacent to the lining layer.
Claims10
A semiconductor structure, comprising:
- a semiconductor substrate;
- and
- an isolation structure disposed in the semiconductor substrate, wherein the isolation structure comprises:
- a lining layer disposed along a boundary between the isolation structure and the semiconductor substrate;
- a first oxide fill layer disposed over the lining layer;
- a dielectric barrier structure surrounding the first oxide fill layer in a closed loop;
- and
- a second oxide fill layer disposed over the dielectric barrier structure and adjacent to the lining layer,
- wherein the lining layer is in direct contact with the second oxide fill layer.
6 more elements
A semiconductor structure, comprising:
- a semiconductor substrate;
- and
- an isolation structure disposed in the semiconductor substrate, wherein the isolation structure comprises:
- a nitride fill layer;
- a first oxide fill layer disposed over the nitride fill layer;
- a dielectric barrier structure surrounding the first oxide fill layer in a closed loop;
- a second oxide fill layer disposed over the dielectric barrier structure;
- and
- a lining structure disposed between the semiconductor substrate and the isolation structure, wherein the lining structure is in direct contact with the second oxide fill layer.
6 more elements
Dependencies are inferred from the claim text.