Semiconductor structure and method for manufacturing semiconductor structure
AssigneeChangxin Memory Technologies, Inc.
InventorsKui Zhang, Zhan Ying
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AssigneeChangxin Memory Technologies, Inc.
InventorsKui Zhang, Zhan Ying
Estimating the term…
A semiconductor structure and a method for manufacturing the semiconductor structure are provided. The semiconductor structure includes a semiconductor base, a bit line and a word line. The semiconductor base includes a substrate and an isolation structure. The isolation structure is arranged above the substrate and configured to isolate a plurality of active regions from each other. The bit line is arranged in the substrate and connected to the plurality of active regions. The word line is arranged in the isolation structure, intersects with the plurality of active regions and surrounds the plurality of active regions. The substrate is a Silicon-On-Insulator (SOI) substrate.
A semiconductor structure, comprising:
A method for manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.