Memory device and manufacturing method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Hung Lo, Feng-Ming Chang, Ying-Hsiu Kuo
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Abstract
A static random access memory device is provided and includes a first gate of a first pass-gate transistor extending to cross a first number of fins in a first threshold voltage region of a substrate and a second gate of a second pass-gate transistor extending to cross a second number of fins in a second threshold voltage region of a substrate. A boundary of the first threshold voltage region between the first and second gates is arranged closer to one, which crosses a smaller number of fins, of the first and second gates.
Claims20
A static random access memory (SRAM) device, comprising:
- a first gate of a first pass-gate transistor extending to cross a first number of fins in a first threshold voltage region of a substrate;
- and
- a second gate of a second pass-gate transistor extending to cross a second number of fins in a second threshold voltage region of the substrate,
- wherein the first gate and the second gate are aligned to each other on a cross-sectional line along a first direction,
- wherein a boundary of the first threshold voltage region between the first and second gates is arranged closer to one, which crosses a smaller number of fins, of the first and second gates.
A static random access memory (SRAM) device, comprising:
- first and second transistors formed on opposite sides of a boundary of a first voltage region of a substrate, wherein the first and second transistors have first and second threshold voltages respectively, wherein the first and second threshold voltages are different from each other,
- wherein the first transistor comprises a first gate structure extending in a first direction, and the second transistor comprises a second gate structure extending in the first direction,
- wherein the first gate structure and the second gate structure are aligned to each other on a cross-sectional line along the first direction,
- wherein the boundary of the first voltage region between the first and second transistors is arranged closer to the first transistor.
A method, comprising:
- forming a first conductive structure across a plurality of first fins;
- forming a second conductive structure across a plurality of second fins, wherein the first conductive structure and the second conductive structure are aligned to each other on a cross-sectional line along a first direction;
- and
- forming a first layer above the first conductive structure and forming a second layer above the second conductive structure, a work function of the first layer being different from a work function of the second layer,
- wherein a boundary between the first and second layers is closer to the first conductive structure.
Dependencies are inferred from the claim text.