Cavities for center-pinned actuator cooling systems

A cooling system, comprising:

• a plurality of cooling cells, each of the plurality of cooling cells including a flow chamber having an upper chamber, an actuator, and a lower chamber, the upper chamber including a top wall, the actuator located distally from the top wall, the lower chamber including a bottom wall and a sidewall, the lower chamber receiving a fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber, wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices;
• wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness.

A method, comprising:

• driving an actuator to induce a vibrational motion at a frequency, the actuator being configured to undergo the vibrational motion when driven to direct a fluid toward through a chamber including an upper chamber, a lower chamber and the actuator, the upper chamber including a top wall, the actuator located distally from the top wall, the lower chamber including a bottom wall and a sidewall, the lower chamber receiving the fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber;
• wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices;
• wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness.