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US 12,191,839 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHideki Iwamoto, Katsuya Daimon, Tetsuya Kimura
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Abstract
An acoustic wave device includes a support substrate, a piezoelectric layer, and an IDT electrode. The piezoelectric layer is over the support substrate. The IDT electrode is on the piezoelectric layer, and includes a plurality of electrode fingers. An intersecting width of the plurality of electrode fingers is equal to or smaller than about 5λ.
Claims16
An acoustic wave device comprising:
- a support substrate;
- a piezoelectric layer over the support substrate in a thickness direction of the support substrate;
- and
- an IDT electrode on the piezoelectric layer, the IDT electrode including a plurality of electrode fingers;
- wherein
- an intersecting width of the plurality of electrode fingers is equal to or smaller than about 5λ.
3 more elements
Dependencies are inferred from the claim text.