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US 12,191,636 B2Granted
Vertical cavity surface emitting laser (VCSEL) array and manufacturing method
OwnerYang Wang, Yongxiang Heinventors
Life of this patent
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Abstract
A VCSEL array and the method of manufacturing the array are disclosed. The VCSEL array comprises a substrate and a plurality of VCSEL structures formed on the substrate in a regular pattern. A customized metal layer is deposited to electrically connect a selected number but not all of the plurality of VCSEL structures. The selected number of VCSEL structures form an array of a predetermined irregular pattern.
Claims19
A Vertical Cavity Surface Emitting Laser (VCSEL) array, comprising:
- a substrate;
- a plurality of VCSEL structures formed on the substrate in a regular pattern, each VCSEL structure being top-emitting and comprising a first reflector region, an active region, and a second reflector region;
- a metal layer that electrically connects a selected number but not all of the VCSEL structures so that the selected number of the VCSEL structures form a predetermined irregular pattern of light emitters when the VCSEL array is electrically charged;
- and
- an optical component, wherein the metal layer is formed on the optical component and the optical component is fixed with the VCSEL structures in a packaging process.
2 more elements
A Vertical Cavity Surface Emitting Laser (VCSEL) array, comprising:
- a submount;
- a plurality of VCSEL structures formed in a regular pattern, each VCSEL structure comprising a first reflector region, an active region, and a second reflector region, wherein the plurality of VCSEL structures are mounted on the submount via flip-chip method;
- and
- a first metal and a second metal that electrically connect anode and cathode terminals of a selected number but not all of the VCSEL structures respectively so that the selected number of the VCSEL structures form a predetermined irregular pattern of light emitters when the VCSEL array is electrically charged, wherein the first metal and the second metal are formed on the submount.
1 more element
A method for manufacturing a Vertical Cavity Surface Emitting Laser (VCSEL) array, comprising:
- forming a plurality of VCSEL structures in a regular pattern on a substrate, each VCSEL structure comprising a multiple-quantum-well (MQW), an n-type Distributed Bragg Reflector (DBR), and a p-type DBR;
- disabling a selected number of the plurality of VCSEL structures so that remaining VCSEL structures form a predetermined irregular pattern of light emitters when the VCSEL array is electrically charged, wherein the disabling step comprises using ion implantation to disable the selected number of the plurality of VCSEL structures;
- forming a different via for each of the remaining VCSEL structures;
- and
- forming a metal layer to electrically connect the remaining VCSEL structures through the vias.
2 more elements
Dependencies are inferred from the claim text.