Light source generation apparatus, light source generating method, and related defect detection system

An EUV radiation light source generating method, comprising:

• utilizing a pump laser to provide a pulse laser radiation beam to an optical propagation path, wherein the pulse laser radiation beam has a first pulse duration;
• conducting a center wavelength conversion operation on the optical propagation path, so as to convert a first center wavelength of the pulse laser radiation beam to a second center wavelength, wherein the first center wavelength is different from the second center wavelength;
• conducting a first spectrum extending operation on the optical propagation path, so as to extend a first bandwidth of the pulse laser radiation beam to a second bandwidth, wherein the first bandwidth is smaller than the second bandwidth;
• conducting a first phase compensation operation on the optical propagation path, wherein the first phase compensation operation is configured to make a plurality of frequency components of the pulse laser radiation beam having the second bandwidth substantially in phase, the pulse laser radiation beam processed by the first phase compensation operation has a second pulse duration, and the first pulse duration is greater than the second pulse duration;
• and
• focusing the pulse laser radiation beam, processed by the first spectrum extending operation, the first phase compensation operation, and the center wavelength conversion operation, to a high order harmonic generation medium to generate a high order harmonic radiation beam.

A defect detection system, comprising:

• an EUV radiation light source generation apparatus, comprising:
• a pump laser, configured to provide a pulse laser radiation beam;
• at least one pulse shaping unit, wherein each one of the at least one pulse shaping unit is configured to conduct a spectrum extending operation and a phase compensation operation to the pulse laser radiation beam, and the phase compensation operation is configured to make a plurality of frequency components of the pulse laser radiation beam emitted by the pulse shaping unit to be substantially in phase;
• a wavelength conversion unit, configured to conduct a center wavelength conversion operation to the pulse laser radiation beam;
• and
• a high-order harmonics generation unit, configured to receive the pulse laser radiation beam processed by the at least one pulse shaping unit and the center wavelength conversion operation, and configured to focus the received pulse laser radiation beam to a high order harmonic generation medium to generate a high order harmonic radiation beam;
• and
• a defect detection apparatus, comprising:
• a testing platform, configured to set a sample under test, wherein the high order harmonic radiation beam is configured to be incident to the sample under test by a predetermined angle of incidence;
• a detection unit, configured to detect a diffraction result of the high order harmonic radiation beam diffracting the sample under test;
• and
• an analysis unit, electrically coupled to the detection unit, and configured to construct an image corresponding to the sample under test according to the diffraction result.