Semiconductor structure comprising up-narrow and down-wide openings and forming method thereof
AssigneeChangxin Memory Technologies, Inc.
InventorZengyan Fan
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AssigneeChangxin Memory Technologies, Inc.
InventorZengyan Fan
Estimating the term…
The present application provides a semiconductor structure and a forming method thereof. The method of forming the semiconductor structure includes: providing a semiconductor chip and a substrate; forming, on the substrate, a first covering film covering a metal pad and a surface of the substrate, a plurality of up-narrow and down-wide openings being formed in the first covering film, and a bottom of each of the up-narrow and down-wide openings correspondingly exposing a surface of the metal pad; and flipping the semiconductor chip onto the substrate, such that a solder bump on a metal pillar is correspondingly located in the up-narrow and down-wide opening, and the solder bump fill the up-narrow and down-wide opening.
A method of forming a semiconductor structure, comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.