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US 12,191,184 B2Granted
Fixture
AssigneeChangxin Memory Technologies, Inc.
InventorZhongyang Wei
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to a fixture, the fixture is a fixture for a semiconductor etching machine, and the fixture includes: a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism, being rotatably arranged on the support mechanism; and at least one cleaning unit, being arranged on the cleaning mechanism.
Claims20
A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises:
- a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine;
- a cleaning mechanism, being rotatably arranged on the support mechanism;
- and
- at least one cleaning unit, being arranged on the cleaning mechanism;
- wherein the cleaning mechanism comprises:
- a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit;
- and
- a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism;
- wherein the support mechanism comprises:
- an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit;
- and
- a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine;
- wherein the cleaning unit comprises:
- a support part, being rotatably arranged on the rotating unit;
- and
- a positioning part, configured to position the support part at a preset position;
- wherein the limiting unit comprises:
- a limiting ring, wherein the limiting ring is sleeved on the annular support unit, and one end of the limiting ring is detachably connected with the rotating unit;
- and the other end of the limiting ring is provided with a first limiting member, the first limiting member is located below the annular support unit.
16 more elements
A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises:
- a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine;
- a cleaning mechanism, being rotatably arranged on the support mechanism;
- and
- at least one cleaning unit, being arranged on the cleaning mechanism;
- wherein the cleaning mechanism comprises:
- a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit;
- and
- a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism;
- wherein the support mechanism comprises:
- an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit;
- and
- a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine;
- wherein the cleaning unit comprises:
- a support part, being rotatably arranged on the rotating unit;
- and
- a positioning part, configured to position the support part at a preset position;
- wherein the limiting unit comprises:
- a limiting part, wherein the limiting part is arranged at intervals on an outside of the annular support unit, one end of the limiting part is detachably connected with the rotating unit, the other end of the limiting part is provided with a second limiting member, and the second limiting member is located below the annular support unit.
15 more elements
A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises:
- a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine;
- a cleaning mechanism, being rotatably arranged on the support mechanism;
- and
- at least one cleaning unit, being arranged on the cleaning mechanism;
- wherein the cleaning mechanism comprises:
- a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit;
- and
- a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism;
- wherein the support mechanism comprises:
- an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit;
- and
- a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine;
- wherein the cleaning unit comprises:
- a support part, being rotatably arranged on the rotating unit;
- and
- a positioning part, configured to position the support part at a preset position;
- wherein the fixture further comprising:
- a rotating mechanism, being arranged between the rotating unit and the annular support unit to rotate the rotating unit relative to the annular support unit;
- wherein the rotating mechanism comprises:
- a ball;
- or
- a roller, an axial direction of the roller is parallel to a radial direction of the annular support unit;
- wherein an annular rolling slot or a plurality of limiting slots are arranged on the annular support unit, and a plurality of the balls or a plurality of the rollers are located in the annular rolling slot or the plurality of limiting slots.
20 more elements
Dependencies are inferred from the claim text.