Load port and multi-use carrier
AssigneeBrillian Network & Automation Integrated System Co., Ltd.
InventorYi-Jun Gu
Life of this patent
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AssigneeBrillian Network & Automation Integrated System Co., Ltd.
InventorYi-Jun Gu
Estimating the term…
A load port and a multi-use carrier are provided. The load port includes a carrying board, two gas-inlet nozzles disposed on the carrying board, and two gas-outlet nozzles disposed on the carrying board. Each of the two gas-inlet nozzles has a shared gas-inlet channel. Each of the two gas-outlet nozzles has a first gas-outlet channel and a second gas-outlet channel that is spaced apart from the first gas-outlet channel. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the first gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a first wafer cassette. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the second gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a second wafer cassette.
A load port for being configured to selectively carry one of a first wafer cassette and a second wafer cassette that is different from the first wafer cassette, the load port comprising:
Dependencies are inferred from the claim text.