Storage system, query system and storage method for reticles, and computer device

A query system for reticles, comprising:

• a server, connected with a storage device of at least one storage system and configured to acquire coding information of the storage system and reticle position information stored in the storage device;
• an input device, configured to input preset reticle number information;
• a query device respectively connected with the server and the input device and configured to acquire the reticle number information of the corresponding storage system and the corresponding reticle position information according to the preset reticle number information;
• and
• an output device, connected with the query device and configured to output the coding information corresponding to the preset reticle number information and the corresponding reticle position information;
• wherein the storage system comprises:
• carrier devices, comprising reticle placing regions for placing the reticles;
• a storage device, storing a preset coordinate system and position information of the carrier devices in the preset coordinate system;
• detection devices arranged in one-to-one correspondence with the carrier devices, wherein each of the detection devices is configured to perform reticle detection on a respective one of the carrier devices, send a first detection signal responsive to a reticle being placed in the reticle placing region of the carrier device, and send a second detection signal responsive to a reticle being placed outside the reticle placing region of the carrier device;
• the detection devices are connected with the storage device, and the storage device is further configured to store reticle position information of the reticle in the preset coordinate system when receiving the first detection signal or the second detection signal;
• and
• alarm devices connected with the detection devices in one-to-one correspondence, wherein each of the alarm devices is configured to implement alarm display when receiving the second detection signal.

A storage method for storing reticles, used for a storage system for storing reticles comprising carrier devices, the method comprising:

• acquiring position information of each of the carrier devices in a preset coordinate system;
• detecting whether a reticle is placed on each carrier device;
• responsive to the reticle being placed on the carrier device, storing reticle position information of the reticle in the preset coordinate system;
• and
• responsive to the reticle being placed outside a reticle placing region on the carrier device, implementing alarm display.