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US 12,191,173 B2Granted
Wire tension adjustment method and wire tension adjuster
AssigneeKabushiki Kaisha Shinkawa
InventorsToshihiko Toyama, Yuu Hasegawa
Life of this patent
Estimating the term…
Abstract
Provided is a wire tension adjuster (60) that adjusts tension (T) applied to a wire (18) of a wire bonding apparatus (100). In the wire tension adjuster (60), in a state in which the wire (18) is gripped by a wire clamper (17), air is supplied to a wire tensioner (40) and a height position (H) of a tip (14f) of a bonding arm (14) is detected, and a flow rate (G) of the air supplied to the wire tensioner (40) is adjusted based on the height position (H) detected, thereby adjusting the tension (T) applied to the wire (18).
Claims14
A wire tension adjustment method, for adjusting tension applied to a wire of a wire bonding apparatus, the wire bonding apparatus comprising:
- a bonding arm, rotatably attached to a bonding head and having a tip movable in an up-down direction;
- a wire clamper, attached to the bonding arm, gripping and releasing the wire inserted through a bonding tool held by the tip;
- a wire tensioner, applying tension to the wire by an airflow;
- an air flow detector, detecting a flow rate of air supplied to the wire tensioner;
- a height position detector, detecting a height position of the tip of the bonding arm;
- and
- a spring member, generating a rotational moment in a direction opposite to a rotation direction of the bonding arm,
- wherein the wire tension adjustment method comprises:
- a height position detection step, in which air is supplied to the wire tensioner in a state in which the wire is gripped by the wire clamper, and the height position of the tip of the bonding arm where a rotational moment in the rotation direction of the bonding arm due to tension of the wire and the rotational moment in the direction opposite to the rotation direction of the bonding arm due to the spring member balance each other is detected by the height position detector;
- and
- an adjustment step, in which, by adjusting the flow rate of the air supplied to the wire tensioner based on the height position detected, the tension applied to the wire is adjusted.
8 more elements
A wire tension adjustment method, for adjusting tension applied to a wire of a wire bonding apparatus, the wire bonding apparatus comprising:
- a bonding arm, rotatably attached to a bonding head and having a tip movable in an up-down direction;
- a wire clamper, attached to the bonding arm, gripping and releasing the wire inserted through a bonding tool held by the tip;
- a wire tensioner, applying tension to the wire by an airflow;
- an air flow detector, detecting a flow rate of air supplied to the wire tensioner;
- a height position detector, detecting a height position of the tip of the bonding arm;
- and
- a spring member, generating a rotational moment in a direction opposite to a rotation direction of the bonding arm,
- wherein the wire tension adjustment method comprises:
- a detection step, in which, in a state in which the wire is gripped by the wire clamper, while the flow rate of the air supplied to the wire tensioner is changed, a plurality of the height positions of the tip of the bonding arm where a rotational moment in the rotation direction of the bonding arm due to tension of the wire and the rotational moment in the direction opposite to the rotation direction of the bonding arm due to the spring member balance each other and a plurality of flow rates of air are detected by the height position detector and the air flow detector;
- and
- an adjustment step, in which an approximation curve defining each of the height position detected of the tip of the bonding arm with respect to each flow rate detected is generated, and the tension applied to the wire is adjusted based on the approximation curve generated.
8 more elements
A wire tension adjuster, used in a wire bonding apparatus and adjusting tension applied to a wire, the wire bonding apparatus comprising:
- a bonding arm, rotatably attached to a bonding head and having a tip movable in an up-down direction;
- a wire clamper, attached to the bonding arm, gripping and releasing the wire inserted through a bonding tool held by the tip;
- a wire tensioner, applying tension to the wire by an airflow;
- an air flow detector, detecting a flow rate of air supplied to the wire tensioner;
- a height position detector, detecting a height position of the tip of the bonding arm;
- and
- a spring member, generating a rotational moment in a direction opposite to a rotation direction of the bonding arm,
- wherein, in the wire tension adjuster,
- air is supplied to the wire tensioner in a state in which the wire is gripped by the wire clamper, and the height position of the tip of the bonding arm where a rotational moment in the rotation direction of the bonding arm due to tension of the wire and the rotational moment in the direction opposite to the rotation direction of the bonding arm due to the spring member balance each other is detected by the height position detector;
- and
- by adjusting the flow rate of the air supplied to the wire tensioner based on the height position detected, the tension applied to the wire is adjusted.
8 more elements
A wire tension adjuster, used in a wire bonding apparatus and adjusting tension applied to a wire, the wire bonding apparatus comprising:
- a bonding arm, rotatably attached to a bonding head and having a tip movable in an up-down direction;
- a wire clamper, attached to the bonding arm, gripping and releasing the wire inserted through a bonding tool held by the tip;
- a wire tensioner, applying tension to the wire by an airflow;
- an air flow detector, detecting a flow rate of air supplied to the wire tensioner;
- a height position detector, detecting a height position of the tip of the bonding arm;
- and
- a spring member, generating a rotational moment in a direction opposite to a rotation direction of the bonding arm,
- wherein, in the wire tension adjuster,
- in a state in which the wire is gripped by the wire clamper, while the flow rate of the air supplied to the wire tensioner is changed, a plurality of the height positions of the tip of the bonding arm where a rotational moment in the rotation direction of the bonding arm due to tension of the wire and the rotational moment in the direction opposite to the rotation direction of the bonding arm due to the spring member balance each other are detected by the height position detector, and a plurality of flow rates of the air supplied to the wire tensioner are detected by the air flow detector;
- and
- an approximation curve defining each of the height position detected of the tip of the bonding arm with respect to each flow rate detected is generated, and the tension applied to the wire is adjusted based on the approximation curve generated.
8 more elements
Dependencies are inferred from the claim text.