Back to results
US 12,191,172 B2Granted
Tape mounter
AssigneeDisco Corporation
InventorsToshiyasu Rikiishi, Yuuki Yasuda
Life of this patent
Estimating the term…
Abstract
A tape mounter includes a frame delivery mechanism for delivering a ring frame, a wafer delivery mechanism for delivering a wafer, a tape affixing mechanism for affixing a dicing tape to a ring frame and a wafer and integrally combining the ring frame and the wafer with each other to turn them into a frame set, a frame cassette stage for placing a frame cassette thereon, a robot capable of removing a ring frame from the frame cassette placed on the frame cassette stage or storing the frame set into the frame cassette placed on the frame cassette stage, and a controller.
Claims17
A tape mounter comprising:
- a base;
- a frame table disposed on the base for holding a lower surface of a ring frame having an opening defined therein;
- a wafer table disposed on the base for holding a lower surface of a wafer within the opening in the ring frame;
- a frame delivery mechanism for delivering a ring frame to the frame table;
- a wafer delivery mechanism for delivering a wafer to the wafer table;
- a tape affixing mechanism for affixing a dicing tape to a ring frame and a wafer and integrally combining the ring frame and the wafer with each other to turn them into a frame set;
- a frame cassette stage for placing thereon a frame cassette capable of storing ring frames, the frame cassette stage being disposed on the base;
- a robot having a frame holder for holding a ring frame thereon and being capable of removing a ring frame from the frame cassette placed on the frame cassette stage or storing the frame set into the frame cassette placed on the frame cassette stage;
- and
- a controller,
- wherein the controller performs
- a control process for
- controlling the frame holder of the robot to hold and remove a ring frame from the frame cassette on the frame cassette stage,
- a control process for controlling the frame delivery mechanism to receive the ring frame held by the frame holder of the robot,
- a control process for controlling the frame holder of the robot to receive the frame set held by the frame delivery mechanism, and
- a control process for controlling the frame holder of the robot to store the frame set held by the frame holder of the robot into the frame cassette on the frame cassette stage.
13 more elements
A tape mounter comprising:
- a base;
- a frame table disposed on the base for holding a lower surface of a ring frame having an opening defined therein;
- a wafer table disposed on the base for holding a lower surface of a wafer within the opening in the ring frame;
- a frame delivery mechanism for delivering a ring frame to the frame table;
- a wafer delivery mechanism for delivering a wafer to the wafer table;
- a tape affixing mechanism for affixing a dicing tape to a ring frame and a wafer and integrally combining the ring frame and the wafer with each other to turn them into a frame set;
- a first frame cassette stage for placing thereon a first frame cassette capable of storing ring frames, the first frame cassette stage being disposed on the base;
- a second frame cassette stage for placing thereon a second frame cassette, wherein the second frame cassette stage is not the first frame cassette stage, the second frame cassette stage being disposed on the base;
- a robot having a frame holder for holding a ring frame thereon and being capable of removing a ring frame from the first frame cassette placed on the first frame cassette stage or storing the frame set into the second frame cassette placed on the second frame cassette stage;
- and
- a controller,
- wherein the controller performs
- a control process for controlling the frame holder of the robot to hold and remove a ring frame from the first frame cassette on the first frame cassette stage,
- a control process for controlling the frame delivery mechanism to receive the ring frame held by the frame holder of the robot,
- a control process for controlling the frame holder of the robot to receive the frame set held by the frame delivery mechanism, and
- a control process for controlling the frame holder of the robot to store the frame set held by the frame holder of the robot into the second frame cassette on the second frame cassette stage.
13 more elements
Dependencies are inferred from the claim text.