Method of manufacturing semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Yao Lee, Chen Yi Hsu, Wei-Hsiang Tseng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Yao Lee, Chen Yi Hsu, Wei-Hsiang Tseng
Estimating the term…
A method includes providing a first plate including a first surface, a second surface opposite to the first surface, and a first recess indented from the first surface towards the second surface; providing a semiconductor structure including a third surface, a fourth surface opposite to the third surface, and a first sidewall extending between the third surface and the fourth surface; placing the semiconductor structure over the first plate; and disposing a priming material over the third surface of the semiconductor structure, wherein a peripheral portion of the fourth surface of the semiconductor structure is in contact with the first surface of the first plate upon the disposing of the priming material.
A method, comprising:
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A method, comprising:
Dependencies are inferred from the claim text.