Semiconductor structure and method for manufacturing semiconductor structure
AssigneeChangxin Memory Technologies, Inc.
InventorsKang You, Jie Bai
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AssigneeChangxin Memory Technologies, Inc.
InventorsKang You, Jie Bai
Estimating the term…
A semiconductor structure and a method for manufacturing the semiconductor structure are provided. The method includes: providing a substrate including a core NMOS area, a core PMOS area and a peripheral NMOS area; performing oxidation treatment on the substrate in the core PMOS area to convert a thickness of a part of the substrate in the core PMOS area into an oxide layer; removing the oxide layer; forming a first semiconductor layer on the remaining substrate in the core PMOS area; forming a gate dielectric layer located on the first semiconductor layer and on the substrate in the core NMOS area and the peripheral NMOS area; and forming a gate on the gate dielectric layer.
A method for manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.