Monolithic modular microwave source with integrated process gas distribution

A lid assembly for a microwave source configured to generate a plasma in a processing chamber, comprising:

• a electrically conductive body having a first surface, a second surface opposite the first surface, and an opening extending from the first surface to the second surface;
• a dielectric resonator arranged in the opening;
• a lid plate mated to the first surface;
• a monopole antenna passing through the lid plate and extending into the dielectric resonator;
• a showerhead mated to the second surface and having a plurality of holes extending through the showerhead;
• a plurality of gas distribution channels disposed into the second surface of the electrically conductive body;
• wherein each of the plurality of gas distribution channels extends from proximate an outer edge of the electrically conductive body toward an axial center of the electrically conductive body along straight and curved paths and includes:
• a cover, at least one first hole extending from the gas distribution channel to the first surface and connectable to a gas line through a hole in the lid plate, and a plurality of second holes extending through the cover and substantially aligned with holes of the showerhead so that a gas introduced to the gas distribution channel is passed into the process chamber through the showerhead.