Compact low angle ion beam extraction assembly and processing apparatus

A processing apparatus, comprising:

• a plasma chamber to house a plasma;
• an extraction plate arranged along a side of a plasma chamber, the extraction plate having an extraction aperture, elongated along a first direction, and having an extraction aperture height, extending along a second direction, perpendicular to the first direction, the extraction plate defining an inner surface along the extraction aperture, lying in a first plane;
• a beam blocker, disposed over the extraction aperture, and having an outer surface, disposed in a second plane, different than the first plane, toward an inner side of the extraction plate,
• wherein the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge,
• wherein the beam blocker comprises a first ridge, disposed along a first end of the beam blocker, and a second ridge, disposed along a second end of the beam blocker;
• and
• a spacer assembly, the spacer assembly comprising a first set, disposed between the extraction plate and the first ridge, and further comprising a second set, disposed between the extraction plate and the second ridge.

A compact angled ion beam apparatus, comprising:

• a plasma chamber to house a plasma;
• and
• an extraction assembly, disposed adjacent to the plasma chamber, and comprising:
• an extraction plate arranged along a side of a plasma chamber, the extraction plate having an extraction aperture, elongated along a first direction, and having an aperture height, extending along a second direction, perpendicular to the first direction, the extraction plate defining an inner surface along the extraction aperture, lying in a first plane;
• a beam blocker, disposed over the extraction aperture, and having an outer surface, disposed in a second plane, different than the first plane, toward an inner side of the extraction plate;
• and
• a coupling assembly, reversibly connecting the beam blocker to the extraction plate,
• wherein the coupling assembly is configured to adjust an overlap distance between the extraction plate and the beam blocker along the second direction, and to adjust a slit width of the extraction assembly, the slit width comprising a distance between the extraction plate and beam blocker along a third direction, perpendicular to the first plane and the second plane.