Charged particle beam system and method for determining observation conditions in charged particle beam device

A charged particle beam system comprising:

• a charged particle device including a charged particle source, a deflector that scans a primary charged particle beam emitted from the charged particle source on a sample, an energy discriminator that energy-discriminates a secondary electron emitted when the primary charged particle beam reaches the sample and a detector that detects the secondary electron that has passed through the energy discriminator;
• and
• a computer system that generates a scan image for each frame of a plurality of frames obtained by the detector based on a detection signal amount of the detector that fluctuates according to scanning of the primary charged particle beam by the deflector and stores the scan image in an image storage unit, wherein the scan image for each frame is acquired by continuously scanning a specific portion of the sample with the primary charged particle beam,
• wherein the computer system calculates a charging amount in the sample based on the scan images obtained corresponding to a plurality of types of scanning conditions, selects a scanning condition in which the charging amount is less than or equal to a predetermined value or a scanning condition which issues a minimum charging amount, and selects a static elimination method corresponding to the selected scanning condition.

A method for determining an observation condition in a charged particle beam device, comprising:

• detecting a secondary electron by a detector by energy-discriminating the secondary electron obtained by scanning a primary charged particle beam emitted from a charged particle source on a sample;
• generating, by a computer, a scan image for each frame of a plurality of frames obtained by the detector based on a detection signal amount of the detector that fluctuates according to scanning of the primary charged particle beam, wherein the scan image for each frame is acquired by continuously scanning a specific portion of the sample with the primary charged particle beam;
• calculating, by the computer, a charging amount for each frame based on an output of the scan image for each frame;
• and
• outputting information on the charging amount by the computer.