Bulk acoustic wave resonator structure
AssigneeSkyworks Global Pte. Ltd.
InventorsKwang Jae Shin, Renfeng Jin, Li Chen
Life of this patent
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Abstract
Embodiments of this disclosure relate to bulk acoustic wave resonators on a substrate. The bulk acoustic wave resonators include a first bulk acoustic wave resonator, a second bulk acoustic wave resonator, a conductor electrically connecting the first bulk acoustic wave resonator to the second bulk acoustic wave resonator, and an air gap positioned between the conductor and a surface of the substrate.
Claims20
An acoustic wave filter with second harmonic suppression, the acoustic wave filter comprising:
- a first bulk acoustic wave resonator on a first side of a substrate, the first bulk acoustic wave resonator including an air cavity;
- a second bulk acoustic wave resonator on the first side of the substrate in anti-series with the first bulk acoustic wave resonator;
- and
- an air gap configured to cause parasitic capacitance associated with an electrical connection between the first bulk acoustic wave resonator and the second bulk acoustic wave resonator to be reduced, the air gap positioned between the electrical connection and the first side of the substrate, the air gap including an air bridge positioned a greater distance from a second side of the substrate than the air cavity, the second side of the substrate being opposite to the first side of the substrate, and the acoustic wave filter configured to filter a radio frequency signal.
An acoustic wave filter with second harmonic suppression, the acoustic wave filter comprising:
- a first bulk acoustic wave resonator on a substrate, the first bulk acoustic wave resonator including a first air cavity;
- a second bulk acoustic wave resonator on the substrate in anti-series with the first bulk acoustic wave resonator, the second bulk acoustic wave resonator including a second air cavity;
- and
- an air gap configured to cause parasitic capacitance associated with an electrical connection between the first bulk acoustic wave resonator and the second bulk acoustic wave resonator to be reduced, the air gap positioned between the electrical connection and the substrate, the air gap overlaps with both the first air cavity and the second air cavity, and the acoustic wave filter configured to filter a radio frequency signal.
An acoustic wave filter with second harmonic suppression, the acoustic wave filter comprising:
- a first bulk acoustic wave resonator on a substrate;
- a second bulk acoustic wave resonator on the substrate in anti-series with the first bulk acoustic wave resonator;
- a first air bridge configured to cause parasitic capacitance associated with an electrical connection between the first bulk acoustic wave resonator and the second bulk acoustic wave resonator to be reduced, the first air bridge positioned between the electrical connection and the substrate;
- and
- a second air bridge configured to cause the parasitic capacitance associated with the electrical connection to be reduced, and the acoustic wave filter configured to filter a radio frequency signal.
An acoustic wave filter with second harmonic suppression, the acoustic wave filter comprising:
- a first bulk acoustic wave resonator on a substrate;
- a second bulk acoustic wave resonator on the substrate in anti-series with the first bulk acoustic wave resonator;
- and
- an air gap configured to cause parasitic capacitance associated with an electrical connection between the first bulk acoustic wave resonator and the second bulk acoustic wave resonator to be reduced, the air gap positioned between the electrical connection and the substrate, the air gap including an air bridge that has a depth in a range from 0.1 micrometer to 0.2 micrometer, and the acoustic wave filter configured to filter a radio frequency signal.
An acoustic wave filter with second harmonic suppression, the acoustic wave filter comprising:
- a first bulk acoustic wave resonator on a substrate;
- a second bulk acoustic wave resonator on the substrate in anti-series with the first bulk acoustic wave resonator;
- and
- an air gap configured to cause parasitic capacitance associated with an electrical connection between the first bulk acoustic wave resonator and the second bulk acoustic wave resonator to be reduced, the air gap positioned between the electrical connection and the substrate, the air gap including an air cavity, the air cavity being a common air cavity that extends from under an electrode of the first bulk acoustic wave resonator to under an electrode of the second bulk acoustic wave resonator, and the acoustic wave filter configured to filter a radio frequency signal.
Dependencies are inferred from the claim text.