Pulsed-DC power generator and method of automatically adjusting arc extinction parameters

A pulsed-DC power generator configured to sputter a target in a chamber, the power generator comprising:

• a first voltage source configured to generate a first voltage,
• a second voltage source configured to generate a second voltage with a polarity opposite to the first voltage,
• a switch unit coupled between the first voltage source and the second voltage source,
• a control unit coupled to the switch unit, and configured to provide a first control signal to control the switching of the switch unit so that the first voltage and the second voltage generate a pulse voltage at an output end, and
• a detection unit coupled to the output end and the control unit, and configured to detect the pulse voltage at the output end,
• wherein the control unit determines that an arc is generated on the surface of the target when the pulse voltage is in a working time period of the first voltage and a voltage variation of the first voltage is higher than a range, and the control unit is configured to control the switch unit to switch the pulse voltage to the second voltage and maintain the second voltage for a first determined time period.