Reduced ripple in switch mode power supply with snubber
AssigneeAdvanced Energy Industries, Inc.
InventorMike Armstrong
Life of this patent
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Abstract
This disclosure describes systems, methods, and apparatus for reducing ripple in a pulsed waveform power generation system, often for use providing power to a plasma processing chamber. A snubber can be provided between a DC power supply and a switching circuit. A buck converter can also be provided between the snubber and the switching circuit, where the buck converter takes its input from within the snubber and in particular from between a rectifying and capacitive component of the snubber. In this way, the buck converter can be isolated from the DC power supply via an input inductor on a high-input line from the DC power supply.
Claims15
A pulsed power converter comprising:
- a DC voltage input;
- a DC output configured for coupling to a plasma load;
- a switching circuit configured to turn a DC waveform into a pulsed DC output for provision to the DC output;
- a snubber circuit arranged between the DC voltage input and the switching circuit, the snubber circuit comprising:
- a rectifying component;
- a capacitive component;
- and
- a node between the rectifying component and the capacitive component, wherein
- the rectifying component is arranged to pass current for charging the capacitive component from the DC voltage input;
- and
- a buck converter coupled between (1) the node and (2) the switching circuit.
A power supply comprising:
- a constant current power supply;
- a buck converter;
- a switching circuit configured to provide a pulsed output to a plasma load via a single magnetron;
- and
- a voltage absorbing/boosting circuit coupled between the constant current power supply and the switching circuit and comprising:
- a rectifying component;
- a first capacitive component;
- and
- a node between the rectifying component and the first capacitive component;
- wherein the buck converter is coupled between the node and a buck switch, the buck switch coupled between the buck converter and the switching circuit.
Dependencies are inferred from the claim text.