Driving substrate, manufacturtion method thereof and display device

A driving substrate, comprising:

• a flexible substrate comprising a display region and a bendable region;
• a first conductive layer on the flexible substrate, and comprising a first wire in the display region and a connection wire at least partially in the bendable region;
• a flexible insulating layer, comprising:
• a first insulation pattern in the display region and having a first opening in which the first wire is located, and a second insulation pattern in the bendable region and at a side of the connection wire far away from the flexible substrate;
• a second conductive layer at a side of the flexible insulating layer far away from the flexible substrate;
• and
• a planarization layer at a side of the second conductive layer far away from the flexible substrate and having a hollow structure in the bendable region,
• wherein a thickness of a portion of the second insulating pattern covering the connection wire is d2, a thickness of the flexible substrate is d3, d2≥2 μm and |d2-d3|≤3 μm.