Detector for detecting charged particles or light
AssigneeHamamatsu Photonics K.K.
InventorsSayaka Takatsuka, Hiroshi Kobayashi
Life of this patent
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Abstract
An embodiment of the present disclosure relates to a detector that includes an AD and detects charged particles or light, and enables speeding up of response of the detector without changing a structure of the AD that limits the response of the detector. A drive circuit of the AD includes a first capacitor and a first resistor. Both the first capacitor and the first resistor are connected in series to the AD in a state where both terminals are set to have the same potential. This configuration reduces the apparent capacitance of the AD and speeds up the response of the entire detector including the drive circuit.
Claims14
A detector for detecting charged particles or light, the detector comprising:
- an avalanche diode having a first electrode electrically connected to a power supply terminal having a first reference potential different from a ground potential, a second electrode electrically connected to a signal output terminal, and an electron incidence plane on which electrons generated due to the charged particles, photoelectrons generated due to the light, or electrons generated by multiplication of the photoelectrons are incident;
- and
- a drive circuit configured to drive the avalanche diode, wherein
- the drive circuit includes:
- a first capacitor disposed on wiring between the power supply terminal and the first electrode of the avalanche diode, the first capacitor having a first terminal electrically connected to the power supply terminal, and a second terminal which is different from the first terminal of the first capacitor and electrically connected to the first electrode of the avalanche diode;
- and
- a first resistor connected in parallel with the first capacitor, the first resistor having a first terminal which is electrically connected to the first terminal of the first capacitor and has a same potential as a potential of the first terminal of the first capacitor, and a second terminal which is electrically connected to the second terminal of the first capacitor and has a same potential as a potential of the second terminal of the first capacitor.
A detector for detecting charged particles or light, the detector comprising:
- an avalanche diode having a first electrode electrically connected to a power supply terminal having a first reference potential different from a ground potential, a second electrode electrically connected to a signal output terminal, and an electron incidence plane on which electrons generated due to the charged particles, photoelectrons generated due to the light, or electrons generated by multiplication of the photoelectrons are incident;
- and
- a drive circuit configured to drive the avalanche diode, wherein
- the drive circuit includes:
- a first capacitor disposed on wiring located between the second electrode of the avalanche diode and a node having a second reference potential different from the first reference potential, the wiring electrically connected to the signal output terminal, the first capacitor having a first terminal electrically connected to the second electrode of the avalanche diode, and a second terminal while which is different from the first terminal of the first capacitor and electrically connected to the signal output terminal;
- a second capacitor having a first terminal electrically connected to the first electrode of the avalanche diode, and a second terminal which is different from the first terminal of the second capacitor and has a same potential as a potential of the node;
- and
- a first resistor connected in parallel with the first capacitor, the first resistor having a first terminal which is electrically connected to the first terminal of the first capacitor and has a same potential as a potential of the first terminal of the first capacitor, and a second terminal which is different from the first terminal of the first resistor, and
- the second terminal of the first resistor is electrically connected to the second terminal of the first capacitor so as to have a same potential as a potential of the second terminal of the first capacitor, or the second terminal of the first resistor is electrically connected to the second terminal of the second capacitor so as to have a same potential as a potential of the second terminal of the second capacitor.
Dependencies are inferred from the claim text.