Hybrid metal line structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPokuan Ho, Chia-Tien Wu, Hsin-Ping Chen, Wei-Chen Chu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPokuan Ho, Chia-Tien Wu, Hsin-Ping Chen, Wei-Chen Chu
Estimating the term…
The present disclosure relates to an integrated chip that includes a substrate, a first metal line, and a hybrid metal line. The first metal line includes a first metal material and is within a first interlayer dielectric (ILD) layer over the substrate. The hybrid metal line is also within the first ILD layer. The hybrid metal line includes a pair of first metal segments that comprise the first metal material. The hybrid metal line further includes a second metal segment that comprises a second metal material that is different from the first metal material. The second metal segment is laterally between the pair of first metal segments.
An integrated chip comprising:
An integrated chip comprising:
An integrated chip comprising:
Dependencies are inferred from the claim text.