Thin-film transistors and MIM capacitors in exclusion zones
AssigneeIntel Corporation
InventorsAbhishek A. Sharma, Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Rajat Paul
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AssigneeIntel Corporation
InventorsAbhishek A. Sharma, Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Rajat Paul
Estimating the term…
Thin-film transistors and MIM capacitors in exclusion zones are described. In an example, an integrated circuit structure includes a semiconductor substrate having a zone with metal oxide semiconductor (MOS) transistors therein, and having a zone that excludes MOS transistors. A back-end-of-line (BEOL) structure is above the semiconductor substrate. A thin-film transistor (TFT) and/or a metal-insulator-metal (MIM) capacitor is in the BEOL structure. The TFT and/or MIM capacitor is vertically over the zone that excludes MOS transistors.
An integrated circuit structure, comprising:
An integrated circuit structure, comprising:
A computing device, comprising:
A computing device, comprising:
An integrated circuit structure, comprising:
An integrated circuit structure, comprising:
Dependencies are inferred from the claim text.