Method of delivering substrate, and substrate delivery system
AssigneeTokyo Electron Limited
InventorTakehiro Shindo
Life of this patent
Estimating the term…
Abstract
A method of delivering a substrate includes moving a holder configured to hold the substrate in a substrate transfer device above a region where an elevating member configured to be capable of being raised/lowered is arranged; and delivering the substrate from the holder to the elevating member by simultaneously performing lowering of the holder and raising of the elevating member, or delivering the substrate from the elevating member to the holder by simultaneously performing lowering of the elevating member that supports the substrate and raising of the holder.
Claims3
A method of delivering a substrate, the method comprising:
- moving a pick configured to hold the substrate in a substrate transfer device above a region where a support pin configured to be capable of being raised/lowered is arranged;
- delivering the substrate from the pick to the support pin by simultaneously performing lowering of the pick and raising of the support pin;
- and
- delivering the substrate from the support pin to the pick by simultaneously performing lowering of the support pin that supports the substrate and raising of the pick.
A substrate delivery system comprising:
- a support pin configured to be capable of being raised/lowered;
- a first driver configured to drive raising/lowering of the support pin;
- a substrate transfer device including a pick configured to hold a substrate and to be capable of being raised/lowered and moving forward and backward with respect to the support pin;
- a second driver configured to drive the raising/lowering and the forward/backward movement of the pick with respect to the support pin;
- and
- a controller configured to control the first driver and the second driver so as to perform a process of:
- moving the pick above a region where the support pin is arranged;
- delivering the substrate from the pick to the support pin by simultaneously performing the lowering of the pick and the raising of the support pin;
- and
- delivering the substrate from the support pin to the pick by simultaneously performing the lowering of the support pin that supports the substrate and the raising of the pick.
Dependencies are inferred from the claim text.