Substrate transfer apparatus, substrate transfer method, and substrate processing system

A substrate transfer method for transferring a substrate using a substrate transfer apparatus,

• the substrate transfer apparatus including:
• a transfer unit including a substrate holder configured to hold a substrate and a base having therein a magnet and configured to move the substrate holder;
• and
• a planar motor including a main body, a plurality of electromagnetic coils disposed in the main body, and a linear driver configured to supply a current to the electromagnetic coils, and magnetically levitate and linearly drive the base,
• wherein the transfer unit has two bases and further includes a link mechanism configured to connect each of the bases and the substrate holder, and
• an extension distance of the substrate holder is changed by controlling the current supplied to the electromagnetic coils such that a gap between the bases becomes a desired gap, and
• the substrate transfer method comprising:
• detecting the substrate at the time of transferring the substrate held by the substrate holder using a substrate detection sensor;
• calculating an actual position of the substrate held by the substrate holder based on detection data of the substrate detection sensor and calculating the actual position of the substrate for a logical position that has been set;
• and
• correcting the transfer position of the substrate based on the correction values.

A substrate processing system comprising:

• a processing chamber for processing a substrate;
• a transfer chamber connected to the processing chamber;
• and
• a substrate transfer apparatus disposed in the transfer chamber and configured to transfer the substrate to a transfer position in the processing chamber,
• wherein the substrate transfer apparatus includes:
• a transfer unit including a substrate holder configured to hold the substrate and a base having therein a magnet and configured to move the substrate holder;
• a planar motor including a main body, a plurality of electromagnetic coils disposed in the main body, and a linear driver configured to supply a current to the electromagnetic coils, and magnetically levitate and linearly drive the base;
• a substrate detection sensor configured to detect the substrate when the substrate held by the substrate holder passes by;
• and
• a transfer controller configured to calculate an actual position of the substrate held by the substrate holder based on detection data of the substrate detection sensor, calculate correction values for a logical position that has been set, and correct a transfer position of the substrate based on the correction values,
• wherein the transfer unit has two bases and further includes a link mechanism configured to connect each of the bases and the substrate holder, and
• an extension distance of the substrate holder is changed by controlling the current supplied to the electromagnetic coils such that a gap between the bases becomes a desired gap.