Substrate processing apparatus for processing substrates
AssigneeASM IP Holding B.V.
InventorsTheodorus Oosterlaken, Chris de Ridder
Life of this patent
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Abstract
The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured for processing a plurality of substrates; and, a substrate handling robot constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second reactor. The apparatus is constructed and arranged with a maintenance area between the first and second reactors to allow maintenance of the reactors from the maintenance area to both the first and second reactor.
Claims20
A substrate processing apparatus, comprising:
- a housing comprising a front wall and a back wall, with a first side wall and a second side wall extending between the front wall and the back wall;
- a first and second module disposed within the housing;
- a substrate handling robot disposed within the housing, the substrate handling robot constructed and arranged to transfer substrates;
- a maintenance area between the respective side walls and between a back wall opening in the back wall and the first and second modules, with the substrate handling robot provided adjacent the maintenance area;
- and
- a handler door forming part of the housing,
- wherein the back wall in top view comprises a first leg and a second leg,
- wherein the maintenance area is between the first leg and the second leg, and
- wherein substrate processing apparatus is constructed and arranged to allow maintenance access by a maintenance worker standing in the maintenance area to the first module, the second module, and the substrate handling robot.
A substrate processing apparatus, comprising:
- a housing comprising sidewalls and a back wall, the housing defining a first leg, a second leg, and an opening therebetween;
- a first module within the first leg and second module within the second leg;
- a door connecting the first leg and the second leg;
- and
- a substrate handling robot disposed within the housing and constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second module,
- wherein the substrate processing apparatus is constructed and arranged to allow maintenance of the substrate handling robot by a person standing in a maintenance area between the door and the substrate handling robot and between the first leg and the second leg, and the first and second modules are constructed and arranged to allow maintenance of the modules from the maintenance area.
Dependencies are inferred from the claim text.