Device and method for high pressure anneal

A processing device comprising:

• a processing chamber;
• a plurality of source inputs to the processing chamber;
• a vent line from the processing chamber;
• a dry anneal vent branch being connected to the vent line, the dry anneal vent branch comprising:
• a cleaner input line being connected to the vent line;
• a cleaner being connected to the cleaner input line;
• and
• a cleaner output line being connected to the cleaner;
• and
• a wet anneal vent branch being connected to the vent line, the wet anneal vent branch comprising:
• a water separator input line being connected to the vent line;
• a water separator being connected to the water separator input line;
• a gas outlet line from the water separator;
• and
• a water outlet line from the water separator.

A processing device comprising:

• a processing chamber attached to a loading chamber, the processing chamber comprising:
• a process gas inlet;
• an inner chamber;
• and
• a gas outlet;
• a plurality of source materials connected to the process gas inlet of the processing chamber by inlet pipes;
• a process vent line connected to the gas outlet of the processing chamber;
• and
• a wet anneal vent system connected to the process vent line, the wet anneal vent system comprising:
• a water separator;
• a water separator inlet to the water separator;
• a first water separator outlet from the water separator;
• and
• a second water separator outlet from the water separator, the second water separator outlet being connected to the plurality of source materials.