Apparatus for temperature control in a substrate processing chamber

A deposition chamber comprising:

• an adapter comprising:
• an adapter body extending longitudinally about a central axis between an upper side and lower side opposite the upper side, the adapter body having a central opening about the central axis, the adapter body having a radially outer portion having a connection surface on the lower side and a radially inner portion having a coolant channel and a stepped surface on the lower side,
• wherein at least a portion of the coolant channel is spaced radially inwardly from a radially inner end of the connection surface, and
• wherein at least the portion of the coolant channel is disposed longitudinally below the connection surface between the connection surface and the stepped surface;
• and
• a chamber body defining an internal cavity surrounding a heater for heating an interior volume of the internal cavity, the chamber body having a connection surface defining an opening of the chamber body coaxial with the central opening of the adapter body, wherein the connection surface of the adapter body is connected to the connection surface of the chamber body;
• an outer shield extending longitudinally and radially from the stepped surface;
• and
• an inner shield extending longitudinally and radially from the upper side of the adapter body toward the stepped surface and extending partially over the outer shield.

A process kit for a deposition chamber comprising:

• an adapter comprising:
• an adapter body extending longitudinally about a central axis between an upper side and lower side opposite the upper side, the adapter body having a central opening about the central axis, the adapter body having a radially outer portion having a connection surface on the lower side and a radially inner portion having a coolant channel and a stepped surface on the lower side,
• wherein at least a portion of the coolant channel is spaced radially inwardly from a radially inner end of the connection surface, and
• wherein at least the portion of the coolant channel is disposed longitudinally below the connection surface between the connection surface and the stepped surface;
• an outer shield extending longitudinally and radially from the stepped surface of the adapter body;
• and
• an inner shield extending longitudinally and radially from an upper surface of the adapter body toward the stepped surface, wherein the inner shield extends partially over the outer shield.