Bottom and middle edge rings
AssigneeLam Research Corporation
InventorsHiran Rajitha Rathnasinghe, Shawn Tokairin, Jon Mcchesney
Life of this patent
Estimating the term…
Abstract
A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring and further configured to be raised and lowered relative to a substrate support includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a guide feature in the upper surface defining the annular outer diameter, an inner annular rim in the upper surface defining the annular inner diameter, and a groove defined in the upper surface between the guide feature and the inner annular rim.
Claims8
A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring, wherein the moveable edge ring is configured to be raised and lowered relative to a substrate support, the middle ring comprising:
- an upper surface;
- an annular inner diameter;
- an annular outer diameter;
- a lower surface;
- a guide feature defining the annular outer diameter,
- wherein at least one of a first upper corner or a second upper corner of the guide feature is chamfered to facilitate alignment and engagement with the moveable edge ring;
- an inner annular rim defining the annular inner diameter, wherein the inner annular rim is stepped downward relative to the guide feature and is configured to support an edge of a substrate;
- and
- a groove defined between the guide feature and the inner annular rim,
- wherein the groove is the only groove on the upper surface of the middle ring, and the groove is an annular groove.
Dependencies are inferred from the claim text.