Plasma reactor
AssigneeNew Power Plasma Co., Ltd.
InventorsSoon Im Wi, Sung Joong Kim, Yoon Jae Kim, Je Hyeong Yoo
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Abstract
Provided is a plasma reactor including a reactor body having a gas inlet at a side thereof, a gas outlet at another side thereof, and an annular loop space therein, a magnetic core provided in a shape surrounding a portion of the reactor body, and wound with a primary coil for receiving power from a power unit, so as to generate plasma by exciting a gas in the annular loop space, and a control unit for determining whether the plasma is in an off state, by comparing, to a reference value, an electrical parameter related to an output of the primary coil.
Claims9
A plasma reactor comprising:
- a reactor body having a gas inlet at a side thereof, a gas outlet at another side thereof, and an annular loop space therein;
- a magnetic core provided in a shape surrounding a portion of the reactor body, and wound with a primary coil for receiving power from a power generator, so as to generate plasma by exciting a gas in the annular loop space;
- a controller for determining whether the plasma is in an off state, by comparing, to a reference value, an electrical parameter related to an output of the primary coil;
- and
- a sensor for measuring an electrical signal for obtaining the electrical parameter,
- wherein the electrical parameter comprises a phase difference between a current and a voltage through the primary coil,
- wherein the controller obtains the electrical parameter based on the electrical signal,
- wherein the reference value is set as a range including the electrical parameter of a case when the plasma is in an on state, and
- wherein the controller determines that the plasma in the reactor body is in the off state, when the phase difference is greater than the reference value.
Dependencies are inferred from the claim text.