Inert gas sample transfer for beam systems

A system, comprising:

• a sample transfer capsule configured to transport a sample, comprising:
• a container configured to store the sample, wherein the container is adjustable between a closed configuration and an open configuration;
• an inert gas storage chamber coupled to the container and configured to store an inert gas;
• and
• a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration;
• and
• a charged particle beam system, comprising:
• at least one column configured to generate and direct a charged particle beam toward the sample;
• a vacuum chamber;
• and
• a stage positioned within the vacuum chamber and movable within the vacuum chamber;
• wherein the sample transfer capsule is mountable to the stage, wherein the container of the sample transfer capsule is configured to adjust from the closed configuration providing an inert gas environment for the sample to the open configuration, and wherein the sample is exposable to the charged particle beam when the container is in the open configuration.

A method, comprising:

• positioning a sample transfer capsule within a vacuum chamber of a charged particle beam system, wherein the sample transfer capsule seals a sample within a container of the sample transfer capsule filled with inert gas;
• pumping the vacuum chamber to create a vacuum within the vacuum chamber;
• opening the sample transfer capsule to expose the sample to a charged particle beam;
• closing the sample transfer capsule to seal the sample within the sample transfer capsule;
• opening a valve of the sample transfer capsule to fill the container with the inert gas from an inert gas storage chamber of the sample transfer capsule;
• and
• removing the sample transfer capsule from the vacuum chamber.