System and method for modeling damages caused by incident particles

A system comprising:

• at least one processor;
• and
• a non-transitory storage medium storing instructions that, when executed by the at least one processor, cause the at least one processor to perform operations for modeling damages to a crystal caused by an incident particle,
• wherein the operations comprise,
• obtaining particle information and crystal information,
• estimating energy loss of the incident particle based on the particle information and on the crystal information,
• estimating a volume of a vacancy based on the energy loss,
• estimating a vacancy reaction based on the crystal information and on the volume of the vacancy, and
• generating output data based on the vacancy reaction, the output data including quantification data of the damages to verify design of integrated circuit before fabrication.

A method of modeling damages to a crystal caused by an incident particle, the method comprising:

• obtaining particle information and crystal information;
• estimating energy loss of the incident particle based on the particle information and on the crystal information;
• estimating a volume of a vacancy based on the energy loss,
• wherein the estimating of the volume of the vacancy includes,
• estimating a first volume of the vacancy caused by the energy loss,
• estimating a second volume caused by diffusion of the vacancy, and
• calculating the volume of the vacancy based on a sum of the first volume and the second volume;
• estimating a vacancy reaction based on the crystal information and on the volume of the vacancy;
• and
• generating output data based on the vacancy reaction, the output data including quantification data of the damages to verify design of integrated circuit before fabrication.