Resist composition and resist pattern forming method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTsuyoshi Nakamura, Yosuke Suzuki, JunYeob Lee
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTsuyoshi Nakamura, Yosuke Suzuki, JunYeob Lee
Estimating the term…
A resist composition including a base material component (A), an acid generator component (B), and a mixed solvent (S) in which an organic solvent (S1) represented by Formula (s1) is mixed, in which the acid generator component (B) contains a compound (B1) represented by Formula (b1). In the formula, Rb1 represents an aryl group. Rb2 and Rb3 each independently represent an aliphatic hydrocarbon group. Lb1, Lb2, and Lb3 each independently represent a divalent linking group or a single bond. X− represents a counter anion. R1 and R2 each independently represent an alkyl group having 1 to 6 carbon atoms
A resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition comprising:
Dependencies are inferred from the claim text.