Structures and process flow for integrated photonic-electric ic package by using polymer waveguide

A method of making a silicon photonic (SiPh) structure comprising:

• providing an electrical integrated circuit (EIC);
• providing a photonic integrated circuit (PIC) on top of the EIC;
• forming at least one polymer waveguide (PWG) disposed on top of the PIC and forming a polymer bridging layer, wherein the at least one PWG comprises a core layer comprising a first polymer and at least two cladding layers comprising a second polymer that surrounds the core layer;
• forming an integration fan-out redistribution (InFO RDL) layer disposed on top of the at least one PWG;
• forming at least one optical lens adjacent to the InFO RDL layer and configured to direct a light signal through the InFO RDL layer;
• and
• forming a SiPh grating coupler between the PIC and the at least one PWG, wherein the SiPh grating coupler comprises first and second grating structures, respectively, wherein light from the at least one optical lens is received by the first grating structure, which changes a direction of the light so that the light is collected by the second grating structure so as to direct light between the PIC and the at least one PWG.

A method of making silicon photonic (SiPh) structure comprising:

• providing an electrical integrated circuit (EIC);
• placing a photonic integrated circuit (PIC) on top of the EIC;
• forming a first polymer waveguide (PWG) on top of the PIC, wherein the first PWG comprises a first core layer comprising a first polymer and at least two cladding layers comprising a second polymer that surrounds the core layer;
• forming a second PWG disposed on top of the first PWG, wherein the second PWG comprises a second core layer comprising a third polymer and at least two second cladding layers comprising a fourth polymer that surrounds the second core layer;
• forming at least one optical lens adjacent to the first and second PWGs, wherein the at least one optical lens is configured to direct a light signal from an external source through the first and second PWGs;
• and
• forming a SiPh grating coupler between the PIC and the first PWG, the SiPh grating coupler comprising first and second grating structures, respectively, wherein light from the at least one optical lens is received by the first grating structure, which changes a direction of the light so that the light is collected by the second grating structure so as to direct light between the PIC and the first PWG.