Apparatus and method for inspecting electrostatic chuck

An apparatus for inspection of an electrostatic chuck, the apparatus comprising:

• a measurement unit for measuring first capacitance of a dielectric layer of the electrostatic chuck and measuring second capacitance of an electrode installed in the dielectric layer;
• and
• a control unit configured to evaluate quality of the electrode, based on the first capacitance and the second capacitance,
• wherein the control unit evaluates the quality of the electrode based on at least one of an area of the electrode or whether an arrangement of the electrode with respect to the dielectric layer is asymmetric,
• wherein when the control unit evaluates the quality of the electrode based on the area of the electrode, the control unit calculates the area of the electrode based on an area of the dielectric layer, the first capacitance, and the second capacitance, and compares the calculation result with a reference value, and evaluates the quality of the electrode, based on the comparing result,
• wherein when the control unit evaluates the quality of the electrode based on whether the arrangement of the electrode with respect to the dielectric layer is asymmetric, the control unit divides an area of a top face of the dielectric layer into a plurality of sub-areas, and evaluates the quality of the electrode based on a comparing result between a plurality of third capacitances, wherein the plurality of third capacitances correspond to the plurality of sub-areas.

A method for non-destructive inspection of quality of an electrostatic chuck, the method comprising:

• measuring first capacitance of a dielectric layer of the electrostatic chuck;
• measuring second capacitance of an electrode installed in the dielectric layer;
• and
• evaluating quality of the electrode based on the first capacitance and the second capacitance.