Cantilever probe card and probe module thereof

A probe module of a cantilever probe card, comprising:

• a supporting board;
• a substrate disposed on the supporting board, wherein the substrate has a non-planar shape and has a difference of warpage along a testing direction;
• a plurality of cantilever probes, wherein one end of each of the cantilever probes is connected to the substrate, and another end of each of the cantilever probes is a free end;
• and
• a plurality of fine adjustment members spaced apart from each other and disposed between the supporting board and the substrate, wherein each of the fine adjustment members is configured to be independently operable along the testing direction for changing a distance between the supporting board and the substrate;
• wherein the substrate is deformable through at least one of the fine adjustment members so as to reduce the difference of warpage of the substrate along the testing direction;
• wherein the substrate includes a warpage portion curved toward the supporting board by the difference of warpage, and the at least one of the fine adjustment members corresponds in position to the warpage portion and is configured to press against the warpage portion so as to deform the warpage portion in a direction away from the supporting board.

A probe module of a cantilever probe card, comprising:

• a supporting board;
• a substrate disposed on the supporting board, wherein the substrate has a non-planar shape and has a difference of warpage along a testing direction;
• a plurality of cantilever probes, wherein one end of each of the cantilever probes is connected to the substrate, and another end of each of the cantilever probes is a free end;
• and
• a plurality of fine adjustment members spaced apart from each other and disposed between the supporting board and the substrate, wherein each of the fine adjustment members is configured to be independently operable along the testing direction for changing a distance between the supporting board and the substrate;
• wherein the substrate is deformable through at least one of the fine adjustment members so as to reduce the difference of warpage of the substrate along the testing direction;
• wherein each of the cantilever probes includes:
• a soldering segment having a first end and a second end that is opposite to the first end, wherein the first end is soldered onto the substrate;
• a testing segment spaced apart from the soldering segment along an arrangement direction perpendicular to the testing direction, wherein the testing segment has the needle tip, an outer edge, and an inner edge that is opposite to the outer edge;
• and
• two outer elastic arms spaced apart from each other and each having two ends respectively connected to the second end of the soldering segment and the inner edge of the testing segment, wherein one of the two outer elastic arms adjacent to the needle tip is defined as a first outer elastic arm, and another one of the two outer elastic arms is defined as a second outer elastic arm, and wherein a length of the first outer elastic arm is greater than that of the second outer elastic arm.