Compliant probes including dual independently operable probe contact elements including at least one flat extension spring, methods for making, and methods for using

A Kelvin probe comprising a pair of laterally joined independently compressible probe contact elements for contacting at least an electrical contact on a first circuit element, wherein:

• (a) a first probe contact element comprises a first compliant structure including at least one first spring, a first frame structure having at least a first arm and a second frame structure having longitudinal elements defining a space, the at least one first spring elastically joining the first frame structure to the second frame structure, so that the first arm of the first frame structure slides in the space defined by the second frame structure, the first and second frame structures respectively connecting directly or indirectly to respective first and second tips of the first probe contact element for making electrical contact to respective first and second electrical circuit elements;
• and
• (b) a second probe contact element comprises a second compliant structure including at least one second spring, a third frame structure having at least a second arm and a fourth frame structure having longitudinal elements defining a space, the at least one second spring elastically joining the third frame structure to the fourth frame structure, so that the second arm of the third frame structure slides in the space defined by the fourth frame structure, the third and fourth frame structures respectively connecting directly or indirectly to respective third and fourth tips of the second probe contact element for making electrical contact to the first and second electrical circuit elements,
• wherein the first probe contact element is physically joined to the second probe contact element in such a way that the first and second probe contact elements are electrically isolated from one another by at least one interface feature, and
• wherein the first, second, third, and fourth tips of the first and second probe contact elements are longitudinally movable relative to one another under elastic forces provided by the respect springs connected thereto.