Probe head and substrate inspection device including the same

A probe head, comprising:

• a test board configured to test a reliability of a semiconductor substrate by contacting the semiconductor substrate;
• a load pusher provided on the test board, the load pusher including a frame, a plurality of elastic structures, and a loader blade, the frame having a penetration region, the plurality of elastic structures extending from an inner surface of the frame within the penetration region and spaced apart from each other along a circumferential direction, the loader blade configured to protrude the test board toward the semiconductor substrate, the loader blade connecting to the frame through the plurality of elastic structures;
• and
• a support tensioner configured to support the load pusher,
• wherein each of the plurality of elastic structures includes:
• a plurality of first extending portions extending in a vertical direction and having a first width in a horizontal direction perpendicular to the vertical direction, the horizontal direction being perpendicular to a direction in which each of the plurality of elastic structures extends;
• and
• a plurality of second extending portions extending between the plurality of first extending portions and having a second width smaller than the first width in the horizontal direction.