Semiconductor nanosensing device with multilayer graphene sheet for sequencing or sensing nucleic acids

A sequencing chip for sequencing a strand of nucleic acids comprising

• a. a chip formed from a substrate fabricated from silicon about 1.0 mm to about 10 mm wide, about 1.0 mm to about 10 mm long, with a thickness of about 50 μm to 500 μm;
• b. wherein the substrate has a top layer of silicon nitride (Si3N4) with a thickness of 20 nm to 500 nm;
• c. wherein the substrate optionally has a bottom layer of silicon nitride with a thickness of 20 nm to 500 nm;
• d. wherein the formed chip has at least one hole drilled by a microscopic method in the top layer of silicon nitride and that penetrates the entire thickness of the chip, and wherein the hole is 50 nm to 1000 nm wide and 50 nm to 1000 nm long, wherein the hole is in the shape of a circle or simple polygon;
• e. wherein a multilayer graphene sheet about 1-60 nm thick is affixed to the Si3N4 layer on the top substrate in a latitudinal orientation, and wherein the graphene sheet is subjected to lateral compression to cause a p-type crinkle ruga having a crease to form thereon over the at least one hole;
• and
• f. wherein a pair of electrodes is provided on opposite ends of each hole on the graphene sheet, where the electrodes are connected to electrical detection equipment capable of measuring an ionic current across the graphene sheet and wherein fluctuations in the ionic current of a nucleic acid strand as it interacts with the graphene sheet are measured by the electrical detection equipment and converted into nucleobase assignments.