Measuring apparatus, on-chip instrumentation device and measuring method

An on-chip measurement device comprising:

• a generating photoconductive antenna;
• a detecting photoconductive antenna;
• and
• a waveguide connecting the generating photoconductive antenna and the detecting photoconductive antenna, wherein
• the generating photoconductive antenna is irradiated with a pump light, the detecting photoconductive antenna is irradiated with a probe light, and an electromagnetic wave propagates through the waveguide from the generating photoconductive antenna to the detecting photoconductive antenna, and
• the waveguide includes a set of a first waveguide, a second waveguide, and a third waveguide,
• the second waveguide is divided into a first portion and a second portion, and a gap is provided between the first portion and the second portion, and
• the gap serves as a filter configured to cut noise of a DC component included in the electromagnetic wave.

A measurement method comprising:

• mixing two CW laser lights to generate an interference light having a beat in a range from GHz to THz;
• demultiplexing the interference light into a pump light and a probe light;
• irradiating a transmitting photoconductive antenna with the pump light, and irradiating a detecting photoconductive antenna with the probe light;
• and
• measuring a current value between a pair of electrodes included in the detecting photoconductive antenna.