Three-dimensional measurement device

A three-dimensional measurement device comprising:

• one or a plurality of light source units configured to irradiate an object to be measured with measurement light having a predetermined pattern;
• one or a plurality of image capture units configured to capture an image of the object to be measured which is irradiated with the measurement light;
• and
• a measurement unit configured to measure a three-dimensional shape of the object to be measured on the basis of results of image capture performed by the image capture units,
• wherein the light source units are constituted by an S-iPMSEL of M-point oscillation that outputs light of a band edge wavelength at M-point, and
• the S-iPMSEL comprising:
• an active layer;
• and
• a phase modulation layer optically coupled with the active layer,
• wherein the phase modulation layer comprises a fundamental layer and a plurality of different refractive index regions differing in refractive index from the fundamental layer and distributed two-dimensionally in a plane perpendicular to a thickness direction of the phase modulation layer and, when a virtual square lattice is set in the plane, respective centers of gravity of each different refractive index region is set at a position shifted from a lattice point position of a virtual square lattice in accordance with a phase pattern corresponding to a desired light image,
• a position relative to a lattice point of a different refractive index region of the plurality of different refractive index regions is individually set in accordance with the desired light image, and
• a magnitude of at least one of a plurality of in-plane wavenumber vectors in reciprocal lattice space of the phase modulation layer is made smaller than 2π/λ, wherein λ is an emission wavelength of the active layer.