Linear actuated 3 way spool valve with constant total flow
AssigneeApplied Materials, Inc.
InventorRoger B. Fish
Life of this patent
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AssigneeApplied Materials, Inc.
InventorRoger B. Fish
Estimating the term…
A three-way valve is disclosed. The valve achieved constant flow rate as the valve transitions from 100% flow through the first path to 100% flow through the second path. The valve is linearly actuated, which allows a plurality of valves to be efficiently disposed in a manifold. The valve comprises a spool having two passageways therethrough which converge at the input. The spool is disposed in a housing. By linear movement of the spool within the housing, the amount of the incoming flow that passes through each of the two passageways can be controlled. In certain embodiments, the spool is in communication with an actuator to control its position within the housing. The three-way valve may be used as part of a manifold.
A linear actuated valve, comprising:
A valving system having a plurality of linear actuated valves, comprising:
Dependencies are inferred from the claim text.