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US 12,180,951 B2Granted
Pump module
AssigneeEdwards Vacuum LLC
InventorMarcus Hans Robert Thierley
Life of this patent
Estimating the term…
Abstract
Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.
Claims10
A pump module comprising:
- a flange, configured to be connected to an exterior of a vacuum apparatus in a vacuum-tight manner,
- an ion getter pump and
- a volume getter pump, NEG,
- where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump, the NEG and the flange being arranged separately from each other, characterised in that the ion getter pump and the NEG are configured to be inserted into the vacuum apparatus while the ion getter pump is connected to the flange and the NEG is connected to the ion getter pump before the flange is connected to the exterior of the vacuum apparatus.
1 more element
Dependencies are inferred from the claim text.