Loading device, arrangement and method for loading a reaction chamber
AssigneeBeneq Oy
InventorsJohannes Wesslin, Pekka Soininen, Jonas Andersson
Life of this patent
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AssigneeBeneq Oy
InventorsJohannes Wesslin, Pekka Soininen, Jonas Andersson
Estimating the term…
A loading device, arrangement, and method for loading a reaction chamber inside a vacuum chamber. The loading device includes a loading platform arranged to support the reaction chamber, the loading platform having a first end, a second end and a first direction, a first loading member provided to the loading platform, and a second loading member provided to the loading platform, the first loading member being arranged independently movable in relation to the loading platform and the second loading member in the first direction, and the second loading member being arranged independently movable in relation to the loading platform and the first loading member in the first direction.
A loading device for loading a reaction chamber inside a vacuum chamber, wherein the loading device comprises:
A loading device for loading a reaction chamber inside a vacuum chamber, wherein the loading device comprises:
Dependencies are inferred from the claim text.