Film forming position misalignment correction method and film forming system

A film forming position misalignment correction method comprising:

• replacing a shielding member in a film forming system including a film forming module having a substrate placing table on which a substrate is placed and the shielding member detachably provided so as to cover an edge portion of the substrate placed on the substrate placing table and forming a film on the substrate, a film thickness measuring device for in-situ measuring a film thickness of the film formed in the film forming module, and a transfer mechanism for transferring the substrate to the film forming module and the film thickness measuring device;
• loading the substrate into the film forming module by the transfer mechanism and forming a film on the substrate;
• detecting an amount of film forming position misalignment by transferring the substrate on which the film has been formed to the film thickness measuring device and measuring the film thickness at an edge of the substrate;
• correcting a transfer position of the substrate for the transfer mechanism to eliminate the film forming position misalignment;
• and
• checking the correction by transferring the substrate used for measuring the amount of film forming position misalignment to the film forming module by the transfer mechanism for which the transfer position has been corrected to form a film and determining the amount of film forming position misalignment by measuring a film thickness of the formed film at the end of the substrate by the film thickness measuring device.