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US 12,180,234 B2Granted
Metal organic compounds
AssigneeUmicore AG & Co. KG
InventorsNicholas Rau, Joerg Sundermeyer, Andreas Rivas Nass, Ralf Karch, Annika Frey, Angelino Doppiu, Eileen Woerner
Life of this patent
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Abstract
The invention relates to the synthesis and provision of a new class of volatile metal organic compounds based on bis(alkylimine)glyoxal and bis(dialkylhydrazone)glyoxal ligands in combination with cyclopentadienide and alkyl ligands for use in ALD and CVD processes.
Claims14
Compound having formula
- or formula [(CpR21R22R23R24R25)Ru(R4R5 (DAD) R6R7) R3],
- wherein R3 is selected from H, C1-C3 linear alkyl, or C3-C5 branched alkyl,
- wherein (R4R5 (DAD) R6R7) is selected from a chelating 1,4-diazadiene or a bis-hydrazone derivative of the general formula (R4)—N—CR5—CR6—N—(R7);
- wherein R4 and R7 are independently selected from the group consisting of C1-C3 linear alkyl, C3-C5 branched alkyl, and C3-C6 cyclic alkyl;
- or R4 is (R8,R9)N— and R7 is (R12,R13)N—, and R8, R9, R12 and R13 are independently selected from the group consisting of H, C1-C3 linear alkyl, C3-C5 branched alkyl, or two neighboring groups, selected from R8 and R9 or R12 and R13, which form a C3-C6 saturated or unsaturated cyclic alkyl, which optionally contain a heteroatom selected from O or S;
- R5 and R6 are independently selected from the group consisting of H, C1-C6 linear alkyl, C3-C6 branched alkyl, and C3-C6 cyclic alkyl;
- wherein R21, R22, R23, R24 and R25 are, independently from each other, selected from the group consisting of C1-C3 linear alkyl, C3-C6 branched alkyl, C3-C6 cyclic alkyl and NR312, wherein R31 is selected from the group consisting of H, methyl, ethyl, and isopropyl or two of R21,R22,R23,R24 and R25 are so linked to each other to form a phenylene.
4 more elements
Dependencies are inferred from the claim text.