Microelectromechanical apparatus having multiple vibrating portions

A microelectromechanical apparatus having multiple vibrating portions, comprising:

• a base;
• and
• a thin film, comprising:
• a stationary part, disposed on the base;
• a peripheral part;
• a central part, wherein the peripheral part surrounds the central part;
• at least one first elastic part, comprising:
• at least one first electrode;
• at least one first piezoelectric material layer, wherein the at least one first electrode is electrically connected to the at least one first piezoelectric material layer;
• a first outer connection portion;
• and
• a first inner connection portion, wherein the at least one first elastic part surrounds the peripheral part, the first outer connection portion is connected to the stationary part, and the first inner connection portion is connected to the peripheral part;
• and
• at least one second elastic part, comprising:
• at least one second electrode;
• at least one second piezoelectric material layer, wherein the at least one second electrode is electrically connected to the at least one second piezoelectric material layer;
• a second outer connection portion;
• and
• a second inner connection portion, wherein the at least one second elastic part surrounds the central part, the second outer connection portion is connected to the peripheral part, and the second inner connection portion is connected to the central part;
• wherein when a low frequency electrical driving signal is input to the at least one first electrode, the peripheral part vibrates with a first low-frequency amplitude along an axial direction, and the central part vibrates with a second low-frequency amplitude along the axial direction, and wherein the axial direction is parallel to a normal vector of the base;
• wherein when a high-frequency electrical driving signal is input to the at least one second electrode, the peripheral part vibrates with a first high-frequency amplitude along the axial direction, and the central part vibrates with a second high-frequency amplitude along the axial direction;
• wherein a difference between the first low-frequency amplitude and the second low-frequency amplitude is smaller than a difference between the first high-frequency amplitude and the second high-frequency amplitude.